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Handbook of Thin Film Deposition

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The Handbook of Thin Film Deposition is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, new materials for memory applications and methods for thin film optical processes.  In a major restructuring, this edition of the handbook lays the foundations with an up-to-date treatment of lithography, contamina…

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Science & TechnologyNonfictionEngineeringElectrical & Electronic EngineeringElectronics - Microelectronics