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Thin Film Growth: Physics, Materials Science and Applications

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Thin film technology is used in many applications such as microelectronics, optics, hard and corrosion resistant coatings and micromechanics, and thin films form a uniquely versatile material base for the development of novel technologies within these industries. Thin film growth provides an important and up-to-date review of the theory and deposition techniques used in the formation of thin films.

Part one focuses on the theory of thin film growth, with chapters covering nucleation and g…